Application of cat's-eye retroreflector in micro-displacement measurement

The performance of a cat's-eye retroreflector in interferometric micro-displacement measurements is discussed. Based on paraxial calculations, approximate equations of the wavefront distortion and the measurement error caused by the displacement itself are derived. The capability for nanometer...

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Veröffentlicht in:	Precision engineering 2007, Vol.31 (1), p.68-71
Hauptverfasser:	Ren, Dongmei, Lawton, Kevin M., Miller, Jimmie A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Cat's-eye retroreflector Exact sciences and technology Interferometer Mechanical engineering. Machine design Micro-displacement measurement Precision engineering, watch making
Online-Zugang:	Volltext
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