Application of cat's-eye retroreflector in micro-displacement measurement

The performance of a cat's-eye retroreflector in interferometric micro-displacement measurements is discussed. Based on paraxial calculations, approximate equations of the wavefront distortion and the measurement error caused by the displacement itself are derived. The capability for nanometer...

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Veröffentlicht in:	Precision engineering 2007, Vol.31 (1), p.68-71
Hauptverfasser:	Ren, Dongmei, Lawton, Kevin M., Miller, Jimmie A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Cat's-eye retroreflector Exact sciences and technology Interferometer Mechanical engineering. Machine design Micro-displacement measurement Precision engineering, watch making
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	The performance of a cat's-eye retroreflector in interferometric micro-displacement measurements is discussed. Based on paraxial calculations, approximate equations of the wavefront distortion and the measurement error caused by the displacement itself are derived. The capability for nanometer scale error compensation is suggested.
ISSN:	0141-6359 1873-2372
DOI:	10.1016/j.precisioneng.2006.02.002