Application of cat's-eye retroreflector in micro-displacement measurement

Application of cat's-eye retroreflector in micro-displacement measurement

The performance of a cat's-eye retroreflector in interferometric micro-displacement measurements is discussed. Based on paraxial calculations, approximate equations of the wavefront distortion and the measurement error caused by the displacement itself are derived. The capability for nanometer...

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Veröffentlicht in:Precision engineering 2007, Vol.31 (1), p.68-71
Hauptverfasser: Ren, Dongmei, Lawton, Kevin M., Miller, Jimmie A.
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Cat's-eye retroreflector
Exact sciences and technology
Interferometer
Mechanical engineering. Machine design
Micro-displacement measurement
Precision engineering, watch making
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container_title Precision engineering
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creator Ren, Dongmei
Lawton, Kevin M.
Miller, Jimmie A.
description The performance of a cat's-eye retroreflector in interferometric micro-displacement measurements is discussed. Based on paraxial calculations, approximate equations of the wavefront distortion and the measurement error caused by the displacement itself are derived. The capability for nanometer scale error compensation is suggested.
doi_str_mv 10.1016/j.precisioneng.2006.02.002
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source Elsevier ScienceDirect Journals
subjects Applied sciences
Cat's-eye retroreflector
Exact sciences and technology
Interferometer
Mechanical engineering. Machine design
Micro-displacement measurement
Precision engineering, watch making
title Application of cat's-eye retroreflector in micro-displacement measurement
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