High frequency stability oscillator for surface acoustic wave-based gas sensor
This paper presents a 158 MHz surface acoustic wave (SAW) oscillator used for a gas sensor. As the oscillator element, a SAW delay line on ST-X quartz substrate with low insertion loss ( < 8 dB) and single mode selection capability was developed. Low insertion loss was achieved by an electrode wi...
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Veröffentlicht in: | Smart materials and structures 2006-12, Vol.15 (6), p.1525-1530 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | This paper presents a 158 MHz surface acoustic wave (SAW) oscillator used for a gas sensor. As the oscillator element, a SAW delay line on ST-X quartz substrate with low insertion loss ( < 8 dB) and single mode selection capability was developed. Low insertion loss was achieved by an electrode width control single phase unidirectional transducer (EWC/SPUDT) configuration. Single mode selection was simply accomplished by a comb transducer which is a means of combining the frequency selectivity of two interdigital transducers (IDTs). Coupling of modes (COM) simulation was performed to predict device performance prior to fabrication. The measured frequency response S12 showed a good agreement with simulated results. The effect of the oscillator circuit system temperature shift upon frequency stability was observed in detail. The experimental results showed that the baseline noise was typically up to ~0.7 x 10(-7) in a laboratory environment with temperature control. The oscillator was successfully applied to a gas sensor coated self-assembled composite monolayer as a sensor material for dimethyl-methyl-phosphonate (DMMP). The sensitivity for low DMMP concentration detection was evaluated as ~25 Hz mg(-1) m(-3), and the threshold detection limit was up to 0.5 mg m(-3). |
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ISSN: | 0964-1726 1361-665X |
DOI: | 10.1088/0964-1726/15/6/003 |