Stamps for Submicrometer Soft Lithography Fabricated by Capillary Force Lithography

A convenient, inexpensive technique for fabrication of stamps for submicrometer soft lithography from masters with micrometer‐size features is presented. Templates fabricated by capillary‐force lithography are robust against replica molding of stamps. The Figure shows the resulting metal structure after employing such a second‐generation stamp in microcontact printing of octadecanethiol and subsequent wet chemical etching of the underlying gold.