A novel MOEMS based adaptive optics for X-ray focusing

This work presents the design and microfabrication of a novel X-ray micro-optical system for use in an X-ray microprobe for analysis of biological cells. A reflective microoptoelectromechanical system capable of focusing a wide range of wavelengths has been developed. The lens system consists of a p...

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Veröffentlicht in:	Microelectronic engineering 2006-04, Vol.83 (4), p.1321-1325
Hauptverfasser:	Al Aioubi, M.Y., Prewett, P.D., Huq, S.E., Djakov, V., Michette, A.G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Adaptive optics Applied sciences Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) MOEMS MOXI Novel X-ray optics Optoelectronic devices Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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Beschreibung
Zusammenfassung:	This work presents the design and microfabrication of a novel X-ray micro-optical system for use in an X-ray microprobe for analysis of biological cells. A reflective microoptoelectromechanical system capable of focusing a wide range of wavelengths has been developed. The lens system consists of a pair of microfabricated optical elements, one of which has variable curvature providing a unique mechanically-actuated zoom focusing capability. Experiments have been carried out to measure the changes of the focal length (lens curvature) and for system calibration.
ISSN:	0167-9317 1873-5568
DOI:	10.1016/j.mee.2006.01.107