Nanotribological study of PECVD DLC and reactively sputtered Ti containing carbon films

Amorphous carbon film, also known as DLC film, is a promising material for tribological application. It is noted that properties relevant to tribological application change significantly depending on the method of preparation of these films. These properties are also altered by the compositions of t...

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Veröffentlicht in:	Diamond and related materials 2006-10, Vol.15 (10), p.1743-1752
Hauptverfasser:	Kvasnica, S., Schalko, J., Eisenmenger-Sittner, C., Benardi, J., Vorlaufer, G., Pauschitz, A., Roy, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Diamond like carbon coating Exact sciences and technology Friction force Friction surfaces Materials science Mechanical and acoustical properties of condensed matter Mechanical properties of nanoscale materials MEMS Methods of deposition of films and coatings film growth and epitaxy Nanotribology Physics Pull off force Wear
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