In-depth analysis of defects of an insulating sample by cathodoluminescence
From the classical cathodoluminescence (CL) model, a new method is developed to carry out an in‐depth analysis of an insulating target luminescent defects. The depth profiling is performed using an electron beam energy variation and consequently a CL excitation range variation. The in‐depth distribu...
Gespeichert in:
Veröffentlicht in: | Physica status solidi. A, Applications and materials science Applications and materials science, 2006-02, Vol.203 (3), p.591-599 |
---|---|
Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!