In-depth analysis of defects of an insulating sample by cathodoluminescence

From the classical cathodoluminescence (CL) model, a new method is developed to carry out an in‐depth analysis of an insulating target luminescent defects. The depth profiling is performed using an electron beam energy variation and consequently a CL excitation range variation. The in‐depth distribu...

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Veröffentlicht in:Physica status solidi. A, Applications and materials science Applications and materials science, 2006-02, Vol.203 (3), p.591-599
Hauptverfasser: Renoud, R., Papin, F., Ganachaud, J.-P., Bigarré, J.
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Sprache:eng
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