Electron permeable membranes for MEMS electron sources

Electron permeable membranes for MEMS electron sources

Systems that employ electron beams like electron microscopes or devices for electron beam welding all require high vacuum technology to handle the electrons. This paper describes design, simulation and realization of electron permeable membranes for use in future atmospheric micro electron sources.

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Sensors and actuators. A. Physical. 2006-11, Vol.132 (1), p.98-103
Hauptverfasser: Haase, F., Detemple, P., Schmitt, S., Lendle, A., Haverbeck, O., Doll, T., Gnieser, D., Bosse, H., Frase, G.
Format: Artikel
Sprache:eng
Schlagworte:
Electron permeable membrane
Micro electron source transmittance
Support structure
Thin-film technology
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Systems that employ electron beams like electron microscopes or devices for electron beam welding all require high vacuum technology to handle the electrons. This paper describes design, simulation and realization of electron permeable membranes for use in future atmospheric micro electron sources.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2006.04.042