Microwave Dielectric Film by Aerosol Deposition Method

Integrating and embedding various passive components like a resistor, a capacitor, and an inductor, in one system module, is one of the attractive way to achieve down-sizing, cost-reduction and higher performance in RF wireless communication products such as a cellular phone, a personal digital assistance (PDA) and so on. Aerosol deposition (AD) method can offer the module with passive components by incorporating different materials with various electrical properties. Our tentative goal is developing the compact microwave filter around 20 GHz with low loss using AD method. Since bulk Ba(Zn1/3Ta2/3)O3 has high Q value in high frequency, it is one of the promising candidates for filter dielectrics. In this paper, we describe the experimental results and discussions regarding the microstructure and dielectric properties of Ba(Zn1/3Ta2/3)O3 AD film deposited in various conditions.