Fabrication of Anodic-Alumina Films with Custom-Designed Arrays of Nanochannels

Fabrication of Anodic-Alumina Films with Custom-Designed Arrays of Nanochannels

Focused ion beam (FIB) lithography can be used to selectively close nanochannels in an ordered array on an anodic‐alumina film, producing templates with the nanochannels arranged in custom‐designed geometries (see Figure). Nanochannel closing can be monitored by in‐situ FIB imaging. Nanodevices such...

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Veröffentlicht in:Advanced materials (Weinheim) 2005-01, Vol.17 (2), p.222-225
Hauptverfasser: Liu, N.-W., Datta, A., Liu, C.-Y., Peng, C.-Y., Wang, H.-H., Wang, Y.-L.
Format: Artikel
Sprache:eng
Schlagworte:
Alumina
Alumina, anodic
anodic
focused ion beam
Lithography
Lithography, focused ion beam
Nanopatterning
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Zusammenfassung:Focused ion beam (FIB) lithography can be used to selectively close nanochannels in an ordered array on an anodic‐alumina film, producing templates with the nanochannels arranged in custom‐designed geometries (see Figure). Nanochannel closing can be monitored by in‐situ FIB imaging. Nanodevices such as photonic‐crystal waveguides could be fabricated using this technique.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.200400380