Electrically conducting Bi cluster-assembled wires formed using SiN nanostencils

This paper describes the selective deposition of clusters through nanoscale aperture-slots to form conducting cluster-assembled wires. PMMA coated SiN membranes featuring reactive ion etched aperture-slots were aligned over planar Ti/Au contacts on passivated Si substrates and then placed in the dep...

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Veröffentlicht in:	Microelectronic engineering 2006-04, Vol.83 (4), p.1460-1463
Hauptverfasser:	Partridge, Jim G., Mackenzie, David M.A., Reichel, René, Brown, Simon A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Atomic cluster Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Nanoparticle Nanostencil Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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