Electroforming of Metallic Microparts on Sacrificial Molds made by Two-component Injection Molding

One of the process developments required in Micro System Technology (MST) is oriented to the mass production of metallic microsystem components with high aspect ratios and high surface qualities by galvanic replication. The limiting factor is the generation of suitable templates for electroforming. A production of metallic microsystems or components in large numbers requires on one side the transcription of the special technique of the electroforming step in the LIGA process and on the other side replication and fast multiplication into a mass production process. The envisaged possibility will be given by thermoplastic injection molding of sacrificial molds and the following electroforming on these polymer molds.