High-resolution transmission electron microscopic investigations of molybdenum thin films on faceted α-Al2O3

Epitaxially grown Mo films on a faceted corundum (α‐Al2O3) m plane were investigated by transmission electron microscopy. Low‐ and high‐resolution images were taken from a cross‐section specimen cut perpendicular to the facets. It was possible to identify unambiguously the crystallographic orientation of these facets and explain the considerable deviation (∼10°) of the experimental interfacet angle, as measured with atomic force microscopy (AFM), from the expected value. For the first time, proof is given for a smooth facet and a curvy facet with orientation near to . Moreover, the three‐dimensional epitaxial relationship of an Mo film on a faceted corundum m surface was determined.