Growth and characterization of ZnTe epilayers on (1 0 0) GaAs substrates by metalorganic vapor phase epitaxy
ZnTe films were grown on (1 0 0) GaAs substrates by metalorganic vapor phase epitaxy using dimethylzinc and diethyltelluride as the source materials. It was found that epitaxial ZnTe layers can be obtained on (1 0 0) GaAs substrates, and the crystal quality of the ZnTe layers depends strongly on the...
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Veröffentlicht in: | Journal of crystal growth 2007, Vol.298, p.445-448 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | ZnTe films were grown on (1
0
0) GaAs substrates by metalorganic vapor phase epitaxy using dimethylzinc and diethyltelluride as the source materials. It was found that epitaxial ZnTe layers can be obtained on (1
0
0) GaAs substrates, and the crystal quality of the ZnTe layers depends strongly on the substrate temperature. A high-crystalline-quality ZnTe heteroepitaxial layer with 103
arcsec of the full-width at half-maximum value of the X-ray rocking curve for (4
0
0) reflection, was obtained in this experiment at the substrate temperature of 430
°C. |
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ISSN: | 0022-0248 1873-5002 |
DOI: | 10.1016/j.jcrysgro.2006.10.054 |