Development of novel coating technology by vacuum arc with rotating cathodes for industrial production of nc-(Al1?xTix)N/a-Si3N4 superhard nanocomposite coatings for dry, hard machining
The development of novel superhard nanocomposite, nano-layered coatings and of the coating technology based on vacuum arc evaporation from rotating electrodes is summarized. The nc-(Al1-xTix)Nla-Si3N4 coatings in which the nano-crystals of the Al-rich solid solution with the :ice crystal structure o...
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Veröffentlicht in: | Plasma chemistry and plasma processing 2004-12, Vol.24 (4), p.493-510 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | The development of novel superhard nanocomposite, nano-layered coatings and of the coating technology based on vacuum arc evaporation from rotating electrodes is summarized. The nc-(Al1-xTix)Nla-Si3N4 coatings in which the nano-crystals of the Al-rich solid solution with the :ice crystal structure of TiN are imbedded into a thin matrix of amorphous silicon nitride show high thermal stability, oxidation resistance and excellent performance in dry, fast machining that is superior to the state-of-the-art (Ti1-xAlx)N coatings. |
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ISSN: | 0272-4324 1572-8986 |
DOI: | 10.1007/s11090-004-7929-3 |