Development of novel coating technology by vacuum arc with rotating cathodes for industrial production of nc-(Al1?xTix)N/a-Si3N4 superhard nanocomposite coatings for dry, hard machining

The development of novel superhard nanocomposite, nano-layered coatings and of the coating technology based on vacuum arc evaporation from rotating electrodes is summarized. The nc-(Al1-xTix)Nla-Si3N4 coatings in which the nano-crystals of the Al-rich solid solution with the :ice crystal structure o...

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Veröffentlicht in:Plasma chemistry and plasma processing 2004-12, Vol.24 (4), p.493-510
Hauptverfasser: Jilek, M, Cselle, T, Holubar, P, Morstein, M, Veprek-Heijman, M G J, Veprek, Stan
Format: Artikel
Sprache:eng
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Zusammenfassung:The development of novel superhard nanocomposite, nano-layered coatings and of the coating technology based on vacuum arc evaporation from rotating electrodes is summarized. The nc-(Al1-xTix)Nla-Si3N4 coatings in which the nano-crystals of the Al-rich solid solution with the :ice crystal structure of TiN are imbedded into a thin matrix of amorphous silicon nitride show high thermal stability, oxidation resistance and excellent performance in dry, fast machining that is superior to the state-of-the-art (Ti1-xAlx)N coatings.
ISSN:0272-4324
1572-8986
DOI:10.1007/s11090-004-7929-3