Cross Linking Behavior of Preceramic Polymers Effected by UV- and Synchrotron Radiation

Ceramic properties are important for applications in micro system technologies. Various lithographic methods are being widely used for the direct fabrication of very precise plastic or metal micro structured surfaces. High temperature stable ceramics can be achieved from preceramic polymers using relatively low pyrolysis temperatures. A direct lithographic process to produce ceramic microstructures has been developed.