Fabrication and Structural Evaluation of Beaded Inorganic Nanostructures Using Soft-Electron-Beam Lithography

Soft electron‐beam lithography, a simple high‐resolution patterning technique, is used to fabricate single‐grain‐wide nanostructures, as seen in the figure, of functional ceramic materials, such as zinc oxide and bismuth ferrite. Structural characterization of these nanostructures reveal that average grain size decreases with line width (see the plot in the figure).