Study on Gas Sensing Properties of WO3 Thin Films
Tungsten oxide thin films were prepared by an inorganic-sol-gel dip-coating process, where the sol was obtained by adding citric acid, as chelating agent, to the ammonia solution of tungstic acid. The resultant thin films were a mixture of monoclinic and tetragonal phases of WO3 and, after being pre...
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| Veröffentlicht in: | Key Engineering Materials 2005-01, Vol.280-283, p.319-322 |
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| creator | Jiang, Miao Xu, Ting Xian Hou, Feng Xu, Ming Xia |
| description | Tungsten oxide thin films were prepared by an inorganic-sol-gel dip-coating process, where the sol was obtained by adding citric acid, as chelating agent, to the ammonia solution of tungstic acid. The resultant thin films were a mixture of monoclinic and tetragonal phases of WO3 and, after being pretreated at 600°C and sintered at 650°C, the average grain size of the polycrystalline films was about 500 nm. The gas-sensing properties of WO3 thin films were tested at temperatures ranging from 500° to 600°C and in nitrogen gas containing 5vol% O2 or 5vol% H2. The WO3 sensors exhibited a good sensitivity and response speed at the temperature of 550°C. |
| doi_str_mv | 10.4028/www.scientific.net/KEM.280-283.319 |
| format | Article |
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| title | Study on Gas Sensing Properties of WO3 Thin Films |
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