Deposition and characterization of La2Ti2O7 thin films via spray pyrolysis process
Thin films of La2Ti2O7 have been deposited on fused silica and Si substrates by a spray pyrolysis method using ethylene glycol solution of La(III)-Ti(IV)-citrate complexes as starting material and O2 as a carrier gas. The composition, crystal structure and morphology of the films are studied.
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Veröffentlicht in: | Applied surface science 2007-03, Vol.253 (10), p.4560-4565 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Thin films of La2Ti2O7 have been deposited on fused silica and Si substrates by a spray pyrolysis method using ethylene glycol solution of La(III)-Ti(IV)-citrate complexes as starting material and O2 as a carrier gas. The composition, crystal structure and morphology of the films are studied. |
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ISSN: | 0169-4332 1873-5584 |
DOI: | 10.1016/j.apsusc.2006.10.016 |