Dopant Cylinder Lifetime Monitor

Gordon Smith Freescale Semiconductor, 6501 William Cannon West, Austin TX The cost of consumable materials is a significant component in the cost of implanter operation. With the higher cost of sub-atmospheric gas alternatives it is increasingly important to accurately monitor its usage. The ATMI(R) SDS(R) GasGaugeTM monitoring system accurately monitors gas level in four cylinders simultaneously, throughout their lifetime, in order to optimize usage of gas and related implanter productivity.This paper displays how the GasGauge monitoring system accurately monitors the cylinder contents in SDS(R), VAC(R) and high pressure gas cylinders. Internal and customer test data is also presented to verify these claims.