Internal Resonant Mode of Piezo-Composite Fabricated Using X-Ray Lithography

A ceramic micro fabrication process has been developed for the 1-3 piezo-electric composites which is suitable for high frequency, wideband ultrasonic transducer. This process employs synchrotron radiation (SR) lithography and a micro molding process. This process realized an array of lead zirconate titanate (PZT) rods whose cross section is 25 microns. The material is expected to improve the resolution of the ultrasonic diagnosis, because composites can transmit a short ultrasonic pulse and have high sensitivity. In addition, when circular shape PZT rods is arranged at the apex of the regular triangle, the internal resonant mode became clear to be suppressed.