Control over the Crystalline State of Sapphire

Control over the Crystalline State of Sapphire

Amorphous regions in sapphire with sub‐micrometer 3D resolution have been produced at the focus of a single femtosecond laser pulse. Crystalline‐ to‐amorphous and amorphous‐to‐polycrystalline transitions (crystalline and amorphous regions are marked C and A in the HRTEM image) are induced by single‐...

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Veröffentlicht in:Advanced materials (Weinheim) 2006-06, Vol.18 (11), p.1361-1364
Hauptverfasser: Juodkazis, S., Nishimura, K., Misawa, H., Ebisui, T., Waki, R., Matsuo, S., Okada, T.
Format: Artikel
Sprache:eng
Schlagworte:
Alumina
Crystallinity
laser
Microfabrication
Microfabrication, laser
Phase transitions
Shock amorphization
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Beschreibung
Zusammenfassung:Amorphous regions in sapphire with sub‐micrometer 3D resolution have been produced at the focus of a single femtosecond laser pulse. Crystalline‐ to‐amorphous and amorphous‐to‐polycrystalline transitions (crystalline and amorphous regions are marked C and A in the HRTEM image) are induced by single‐ and multi‐pulse irradiation, respectively. The wet‐etching selectivity for the amorphous phase is significantly greater than that for the crystalline phase in aqueous HF.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.200501837