Comparison of the ionisation efficiency in a microwave and a radio-frequency assisted magnetron discharge

While most of Ionised Physical Vapour Deposition (IPVD) reactors use radio-frequency coils to create additional ionisation, we developed an alternative technique using two microwave antennas to achieve the ionisation of the sputtered vapour. The aim of this paper is to compare the ionisation efficie...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Surface & coatings technology 2005-10, Vol.200 (1-4), p.800-803
Hauptverfasser:	de Poucques, L., Imbert, J.C., Vasina, P., Boisse-Laporte, C., Teulé-Gay, L., Bretagne, J., Touzeau, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Absorption spectroscopy Applied sciences Cross-disciplinary physics: materials science rheology Exact sciences and technology IPVD Materials science Metals. Metallurgy Microwave discharge Other topics in materials science Physics Production techniques RF discharge Sputtering Surface treatment
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!