Comparison of the ionisation efficiency in a microwave and a radio-frequency assisted magnetron discharge

Comparison of the ionisation efficiency in a microwave and a radio-frequency assisted magnetron discharge

While most of Ionised Physical Vapour Deposition (IPVD) reactors use radio-frequency coils to create additional ionisation, we developed an alternative technique using two microwave antennas to achieve the ionisation of the sputtered vapour. The aim of this paper is to compare the ionisation efficie...

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Veröffentlicht in:Surface & coatings technology 2005-10, Vol.200 (1-4), p.800-803
Hauptverfasser: de Poucques, L., Imbert, J.C., Vasina, P., Boisse-Laporte, C., Teulé-Gay, L., Bretagne, J., Touzeau, M.
Format: Artikel
Sprache:eng
Schlagworte:
Absorption spectroscopy
Applied sciences
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
IPVD
Materials science
Metals. Metallurgy
Microwave discharge
Other topics in materials science
Physics
Production techniques
RF discharge
Sputtering
Surface treatment
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Zusammenfassung:While most of Ionised Physical Vapour Deposition (IPVD) reactors use radio-frequency coils to create additional ionisation, we developed an alternative technique using two microwave antennas to achieve the ionisation of the sputtered vapour. The aim of this paper is to compare the ionisation efficiency of these two devices in the same reactor chamber.
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2005.03.046