Comparison of the ionisation efficiency in a microwave and a radio-frequency assisted magnetron discharge
While most of Ionised Physical Vapour Deposition (IPVD) reactors use radio-frequency coils to create additional ionisation, we developed an alternative technique using two microwave antennas to achieve the ionisation of the sputtered vapour. The aim of this paper is to compare the ionisation efficie...
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| Veröffentlicht in: | Surface & coatings technology 2005-10, Vol.200 (1-4), p.800-803 |
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| container_title | Surface & coatings technology |
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| creator | de Poucques, L. Imbert, J.C. Vasina, P. Boisse-Laporte, C. Teulé-Gay, L. Bretagne, J. Touzeau, M. |
| description | While most of Ionised Physical Vapour Deposition (IPVD) reactors use radio-frequency coils to create additional ionisation, we developed an alternative technique using two microwave antennas to achieve the ionisation of the sputtered vapour. The aim of this paper is to compare the ionisation efficiency of these two devices in the same reactor chamber. |
| doi_str_mv | 10.1016/j.surfcoat.2005.03.046 |
| format | Article |
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| identifier | ISSN: 0257-8972 |
| ispartof | Surface & coatings technology, 2005-10, Vol.200 (1-4), p.800-803 |
| issn | 0257-8972 1879-3347 |
| language | eng |
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| source | Elsevier ScienceDirect Journals |
| subjects | Absorption spectroscopy Applied sciences Cross-disciplinary physics: materials science rheology Exact sciences and technology IPVD Materials science Metals. Metallurgy Microwave discharge Other topics in materials science Physics Production techniques RF discharge Sputtering Surface treatment |
| title | Comparison of the ionisation efficiency in a microwave and a radio-frequency assisted magnetron discharge |
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