Electrical conductivity and photoreflectance of nanocrystalline copper nitride thin films deposited at low temperature

Nanocrystalline thin films of copper nitride were grown on Si (1 0 0) wafers at a low substrate temperature by reactive magnetron sputtering of Cu target with the mixture of nitrogen and argon. The influence of nitrogen deficiency upon the structural, optical and electrical properties of as-deposite...

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Veröffentlicht in:	Journal of crystal growth 2005-07, Vol.280 (3), p.490-494
Hauptverfasser:	Du, Y., Ji, A.L., Ma, L.B., Wang, Y.Q., Cao, Z.X.
Format:	Artikel
Sprache:	eng
Schlagworte:	A3. Magnetron sputtering A3. Thin film B1. Copper nitride B2. Electrical properties Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Methods of crystal growth physics of crystal growth Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Physics
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