Characterization of Pb(Zr,Ti)O3 thin films deposited on stainless steel substrates by RF-magnetron sputtering for MEMS applications

Piezoelectric Pb(Zr,Ti)O3 (PZT) thin films with a composition near the morphotoropic phase boundary were deposited directly on cantilever-shaped stainless steel (SUS) substrates using RF-magnetron sputtering for application of micro-electromechanical systems (MEMS). X-ray diffraction measurements re...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2006-01, Vol.125 (2), p.382-386
Hauptverfasser:	Suzuki, Takaaki, Kanno, Isaku, Loverich, Jacob J., Kotera, Hidetoshi, Wasa, Kiyotaka
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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