Characterization of Pb(Zr,Ti)O3 thin films deposited on stainless steel substrates by RF-magnetron sputtering for MEMS applications

Piezoelectric Pb(Zr,Ti)O3 (PZT) thin films with a composition near the morphotoropic phase boundary were deposited directly on cantilever-shaped stainless steel (SUS) substrates using RF-magnetron sputtering for application of micro-electromechanical systems (MEMS). X-ray diffraction measurements reveal that the PZT thin films have a polycrystalline perovskite structure with a preferential orientation of (101). Cross-section morphology - observed using a scanning electron microscope - indicates that the PZT films exhibit a dense columnar structure without pores or clacks. The films' P-E hysteresis loops indicate clear ferroelectricity. Based on the deflection characteristics of the cantilever, the effective piezoelectric coefficient e31 of the PZT films is measured to be -1.35C/m2.