Femtosecond laser fabrication of microspike-arrays on tungsten surface

Microspike-arrays were fabricated by irradiating a femtosecond laser on a tungsten surface through a mask opening in air. The natural logarithms of the calculated intensity distributions diffracted at the edge of the mask opening were qualitatively consistent with the experimental results of the sha...

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Veröffentlicht in:Applied surface science 2005-07, Vol.247 (1), p.340-346
Hauptverfasser: Sano, Tomokazu, Yanai, Masato, Ohmura, Etsuji, Nomura, Yasumitsu, Miyamoto, Isamu, Hirose, Akio, Kobayashi, Kojiro F.
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Sprache:eng
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Zusammenfassung:Microspike-arrays were fabricated by irradiating a femtosecond laser on a tungsten surface through a mask opening in air. The natural logarithms of the calculated intensity distributions diffracted at the edge of the mask opening were qualitatively consistent with the experimental results of the shape and arrays of microspikes fabricated. The shape and the array of microspikes depend on the intensity distribution diffracted at the edge of the mask opening. This microspike-array has the potential to be used as a source of micro emitter tips.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2005.01.049