Theoretical analysis and modeling of the obtaining of polycrystalline silicon in a fluidized-bed reactor
A theoretical analysis has been performed and basic problems of the technology of obtaining polycrystalline silicon by pyrolytic decomposition of monosilane in a fluidized-bed reactor have been considered. A one-dimensional, two-phase model of this process and basic results of mathematical modeling...
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| Veröffentlicht in: | Journal of engineering physics and thermophysics 2005-01, Vol.78 (1), p.47-53 |
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| container_end_page | 53 |
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| container_issue | 1 |
| container_start_page | 47 |
| container_title | Journal of engineering physics and thermophysics |
| container_volume | 78 |
| creator | Borodulya, V A Vinogradov, L M Rabinovich, O S Akulich, A V |
| description | A theoretical analysis has been performed and basic problems of the technology of obtaining polycrystalline silicon by pyrolytic decomposition of monosilane in a fluidized-bed reactor have been considered. A one-dimensional, two-phase model of this process and basic results of mathematical modeling have been presented.[PUBLICATION ABSTRACT] |
| doi_str_mv | 10.1007/s10891-005-0028-3 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 1062-0125 |
| ispartof | Journal of engineering physics and thermophysics, 2005-01, Vol.78 (1), p.47-53 |
| issn | 1062-0125 1573-871X |
| language | eng |
| recordid | cdi_proquest_miscellaneous_29075327 |
| source | SpringerLink Journals |
| subjects | Fluidized bed reactors Silicon wafers Solar energy Studies |
| title | Theoretical analysis and modeling of the obtaining of polycrystalline silicon in a fluidized-bed reactor |
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