Theoretical analysis and modeling of the obtaining of polycrystalline silicon in a fluidized-bed reactor

Theoretical analysis and modeling of the obtaining of polycrystalline silicon in a fluidized-bed reactor

A theoretical analysis has been performed and basic problems of the technology of obtaining polycrystalline silicon by pyrolytic decomposition of monosilane in a fluidized-bed reactor have been considered. A one-dimensional, two-phase model of this process and basic results of mathematical modeling...

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Veröffentlicht in:Journal of engineering physics and thermophysics 2005-01, Vol.78 (1), p.47-53
Hauptverfasser: Borodulya, V A, Vinogradov, L M, Rabinovich, O S, Akulich, A V
Format: Artikel
Sprache:eng
Schlagworte:
Fluidized bed reactors
Silicon wafers
Solar energy
Studies
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Zusammenfassung:A theoretical analysis has been performed and basic problems of the technology of obtaining polycrystalline silicon by pyrolytic decomposition of monosilane in a fluidized-bed reactor have been considered. A one-dimensional, two-phase model of this process and basic results of mathematical modeling have been presented.[PUBLICATION ABSTRACT]
ISSN:1062-0125
1573-871X
DOI:10.1007/s10891-005-0028-3