Structural characterisation of zinc-blende Ga1-xMnxN epilayers grown by MBE as a function of Ga flux

Zinc-blende Ga1-xMnxN epilayers grown by plasma-assisted molecular beam epitaxy as a function of Ga flux are assessed using a variety of structural characterisation techniques. The Ga:N ratio was found to have a dominant impact on the zinc-blende Ga1-xMnxN epilayer growth rate and resultant composition, morphology and microstructure. A maximum growth rate and an improved microstructure are associated with growth under slightly Ga-rich conditions. A reduced growth rate and enhanced Mn incorporation are associated with growth under slightly N-rich conditions. aMnAs inclusions and voids extending into the GaAs buffer layer were observed in all cases, however they are considered not to affect the layer electrical and magnetic properties.