On Superdeep Penetration of a Multiparticle Flux and Damage of Electronic Elements Positioned behind an Obstacle

On Superdeep Penetration of a Multiparticle Flux and Damage of Electronic Elements Positioned behind an Obstacle

Tracks of the material of microparticles interacting with a metallic obstacle and a detector positioned behind it are presented. The experimental data obtained show that the degree of damage of microcircuits positioned behind an obstacle depends on the material of the particles acting on it.[PUBLICA...

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Veröffentlicht in:Journal of engineering physics and thermophysics 2004-05, Vol.77 (3), p.638-640
Hauptverfasser: Belous, A I, Dybov, O A, Romanov, G S, Usherenko, S M, Shvedov, S V
Format: Artikel
Sprache:eng
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Zusammenfassung:Tracks of the material of microparticles interacting with a metallic obstacle and a detector positioned behind it are presented. The experimental data obtained show that the degree of damage of microcircuits positioned behind an obstacle depends on the material of the particles acting on it.[PUBLICATION ABSTRACT]
ISSN:1062-0125
1573-871X
DOI:10.1023/B:JOEP.0000036511.09644.3e