Microwave plasma synthesis of TiN and ZrN nanopowders

Microwave plasma synthesis of TiN and ZrN nanopowders

This work demonstrates that TiN and ZrN nanopowders can be prepared by microwave plasma synthesis method. The effects of flow rate of plasma forming gas, flow rate of carrier gas and feeding rate of precursor raw material to the average particle size were studied. The TiN and ZrN nanopowders were ch...

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Veröffentlicht in:Materials letters 2007-03, Vol.61 (7), p.1583-1587
Hauptverfasser: Chau, Joseph Lik Hang, Kao, Chih Chun
Format: Artikel
Sprache:eng
Schlagworte:
Microwave plasma
Nanomaterials
Nanopowder
Powder technology
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Zusammenfassung:This work demonstrates that TiN and ZrN nanopowders can be prepared by microwave plasma synthesis method. The effects of flow rate of plasma forming gas, flow rate of carrier gas and feeding rate of precursor raw material to the average particle size were studied. The TiN and ZrN nanopowders were characterized by means of transmission electron microscopy (TEM) and X-ray diffraction (XRD).
ISSN:0167-577X
1873-4979
DOI:10.1016/j.matlet.2006.07.175