Multifunctional Probe for Chemical Stimulation and Neural Signal Recording

This paper presents a single-unit neural probe which functions both as a neural signal recorder and a chemical stimulator. The single-unit neural probe contains in-plane shanks with buried microchannels and low-impedance microelectrodes that are fabricated using the roughened polysilicon process. The fabricated neural probe has three 3-mm-long shanks with 10-mum-diameter microchannels, and six 30 mum x 30 tm gold microelectrodes per shank. The impedance magnitude and phase shift of the microelectrodes are 317 kL2 / 900 mum 2 and -56.2 deg at 1 kHz, respectively.