Enhancing SEM positioning precision with a LEGO®‐based sample fitting system

Scanning electron microscopy (SEM) is a precious tool in materials science and morphology sciences, enabling detailed examination of materials at the nanoscale. However, precise and accurate sample repositioning during different observation sessions remains a significant challenge, impacting the qua...

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Veröffentlicht in:Microscopy research and technique 2024-04, Vol.87 (4), p.747-752
Hauptverfasser: Zecca, Piero Antonio, Brambilla, Andrea, Reguzzoni, Marcella, Protasoni, Marina, Raspanti, Mario
Format: Artikel
Sprache:eng
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Zusammenfassung:Scanning electron microscopy (SEM) is a precious tool in materials science and morphology sciences, enabling detailed examination of materials at the nanoscale. However, precise and accurate sample repositioning during different observation sessions remains a significant challenge, impacting the quality and repeatability of SEM analyses. This study aimed to develop and evaluate a LEGO®‐based sample positioning system for SEM analysis. The system was designed to consistently identify and align features across multiple repositioning cycles, maintain accurate positioning along the z‐axis, minimize distortion, and provide repeatable and reliable results. The results indicated a high degree of precision and accuracy in the repositioning process, as evidenced by the minimal displacements, deviations in scaling and shearing, and the highly significant results (p 
ISSN:1059-910X
1097-0029
DOI:10.1002/jemt.24465