Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications

Small size, high bandwidth pressure sensors are required for instrumentation of probes and test models in aerodynamic studies of complex unsteady flows. Optical-fiber pressure sensors promise potential advantages of small size and low cost in comparison with their electrical counterparts. We describe miniature Fabry-Perot cavity pressure sensors constructed by micromachining techniques in a turbine test application. The sensor bodies are 500 /spl mu/m squared, 300 /spl mu/m deep with a /spl sim/2 /spl mu/m-thick copper diaphragm electroplated on one face. The sensor cavity is formed between the diaphragm and the cleaved end of a single mode fiber sealed to the sensor by epoxy. Each sensor is addressed interferometrically in reflection by three wavelengths simultaneously, giving an unambiguous phase determination; a pressure sensitivity of 1.6 radbar/sup -1/ was measured, with a typical range of vacuum to 600 kPa. Five sensors were embedded in the trailing edge of a nozzle guide vane installed upstream of a rotor in a full-scale turbine stage transient test facility. Pressure signals in the trailing edge flow show marked structure at the 8 kHz blade passing frequency. To our knowledge, this is the first report of sensors located at the trailing edge of a normal-sized turbine blade.