Laser ablation of toluene liquid for surface micro-structuring of silica glass

Microstructures with well-defined micropatterns were fabricated on the surfaces of silica glass using a laser-induced backside wet etching (LIBWE) method by diode-pumped solid state (DPSS) UV laser at the repetition rate of 10 kHz. For a demonstration of flexible rapid prototyping as mask-less expos...

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Veröffentlicht in:Applied surface science 2006-04, Vol.252 (13), p.4387-4391
Hauptverfasser: Niino, H., Kawaguchi, Y., Sato, T., Narazaki, A., Gumpenberger, T., Kurosaki, R.
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Sprache:eng
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Zusammenfassung:Microstructures with well-defined micropatterns were fabricated on the surfaces of silica glass using a laser-induced backside wet etching (LIBWE) method by diode-pumped solid state (DPSS) UV laser at the repetition rate of 10 kHz. For a demonstration of flexible rapid prototyping as mask-less exposure system, the focused laser beam was directed to the sample by galvanometer-based point scanning system. Additionally, a diagnostics study of plume propagation in the ablated products of toluene solid film was carried out with an intensified CCD (ICCD) camera.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2005.07.084