Laser-induced modification of glass–ceramics microstructure and applications

The laser-induced modifications in two kinds of glass–ceramics (GCs) with composition TiO 2–SiO 2 (Sitall ST-50) and Li 2O–SiO 2 (Fotoform) were investigated for fabricating optical elements. The laser-induced change of refractive index and surface relief constituted the first step of this task. The...

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Veröffentlicht in:Applied surface science 2005-07, Vol.248 (1), p.231-237
Hauptverfasser: Veiko, V.P., Kieu, Q.K., Nikonorov, N.V., Shur, V.Ya, Luches, A., Rho, S.
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Sprache:eng
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Zusammenfassung:The laser-induced modifications in two kinds of glass–ceramics (GCs) with composition TiO 2–SiO 2 (Sitall ST-50) and Li 2O–SiO 2 (Fotoform) were investigated for fabricating optical elements. The laser-induced change of refractive index and surface relief constituted the first step of this task. The second stage was a chemical processing including ion exchange (Li ↔ Na, K, Rb, for “Fotoform” GCs) and etching of irradiated and non-irradiated areas. As a result of the above-mentioned processes, mini- and micro-optical components based on two GCs have been fabricated: lenses and lens arrays, waveguides and other waveguiding components, diffractive gratings, etc.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2005.03.090