Growth and characterization of Zn1-xCdxO films using remote plasma MOCVD

Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8011, Japan Zn1-xCdxO films were successfully grown by remote plasma enhanced metalorganic chemical vapor deposition (RPEMOCVD) with diethyl zinc, dimethyl cadmium, and oxygen plasma. The Cd composition x in the Zn1-xCdxO films was tuned by changing a...

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Veröffentlicht in:	Applied surface science 2005-05, Vol.244 (1-4), p.381-384
Hauptverfasser:	ISHIHARA, Junji, NAKAMURA, Atsushi, SHIGEMORI, Satoshi, AOKI, Toru, TEMMYO, Jiro
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Ii-vi semiconductors Materials science Methods of deposition of films and coatings film growth and epitaxy Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity) Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of bulk materials and thin films Photoluminescence Physics
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Zusammenfassung:	Shizuoka University, 3-5-1 Johoku, Hamamatsu 432-8011, Japan Zn1-xCdxO films were successfully grown by remote plasma enhanced metalorganic chemical vapor deposition (RPEMOCVD) with diethyl zinc, dimethyl cadmium, and oxygen plasma. The Cd composition x in the Zn1-xCdxO films was tuned by changing a flow rate of group-II sources. With increasing the Cd composition x, the crystal structure was changed from wurzite (WZ) to rock-salt (RS). The optical band-gap of the Zn1-xCdO films with the wurzite structure up to x < or = 0.7 varied from 3.3 eV down to 1.9 eV.
ISSN:	0169-4332 1873-5584
DOI:	10.1016/j.apsusc.2004.10.094