Fabrication of patterned Ba0.71Sr0.29TiO3 thick film on Si substrate by tape casting method

Patterned barium strontium titanate (BST) thick films were fabricated in a grooved silicon substrate using tape casting and sintered from 800 to 1250 C for 2 h. The slurry used for the tape casting was from sol-precipitation method, and the crystallisation of the as precipitated BST powders was improved by hydrothermal treatment at 200 C for 5 h. The patterned BST thick films have a size of 800 x 300 micron and homogeneous thickness of 30 micron. After sintering below 1000 C, the obtained BST thick films had a dielectric abnormality at about 30 C and the dielectric loss was about 0.02. 10 refs.