Measurement of Micro-Tensile Properties for Hard Coating Material TiN

Tensile properties of hard coating material, TiN, were determined using micro-tensile testing system. TiN has been known as a hard coating material commonly used today. Micro-tensile testing system consisted of a micro tensile loading system and a micro-ESPI(Electronic Speckle Pattern Interferometry) system. Micro-tensile loading system had a maximum load capacity of 500mN and resolution of 4.5 run in stroke. TiN thin film 1mum thick was deposited on the Si wafer pre-deposited of Si3N4 film substrate by the closed field unbalanced magnetron sputtering (CFUBMS) process. Three kinds of micro-tensile specimen with the respective width of 50mum, 100mum and 500mum were fabricated by MEMS process. The mechanical properties including tensile strength and elastic modulus were determined using the micro-tensile testing system and compared by those obtained by nano-indentation. (Substrate: silicon wafer.)