Nanostructured In2O3–SnO2 sol–gel thin film as material for NO2 detection

Nanocrystalline SnO2, In2O3 and In2O3-SnO2 thin films have been prepared by modified sol-gel methods making use of no-standard precursors and a suitable surfactant. The oxide thin films have been used as gas-sensing layers in chemoresistive gas sensors and their performances in the detection of nitr...

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Veröffentlicht in:Sensors and actuators. B, Chemical Chemical, 2006-04, Vol.114 (2), p.646-655
Hauptverfasser: Francioso, Luca, Forleo, Angiola, Capone, Simonetta, Epifani, Mauro, Taurino, Antonella M., Siciliano, Pietro
Format: Artikel
Sprache:eng
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Zusammenfassung:Nanocrystalline SnO2, In2O3 and In2O3-SnO2 thin films have been prepared by modified sol-gel methods making use of no-standard precursors and a suitable surfactant. The oxide thin films have been used as gas-sensing layers in chemoresistive gas sensors and their performances in the detection of nitrogen dioxide (2-20ppm in dry air) have been analysed by electrical characterization in controlled atmosphere. The samples have been structurally and morphologically characterized by X-ray diffraction and SEM, respectively. Good gas-sensing responses towards NO2 have been found for all the prepared samples with improved performances for the In2O3-SnO2 based sensor. The performances of the sensors have been discussed according to the surface chemical reactions between the gas phase and the semiconductor.
ISSN:0925-4005
DOI:10.1016/j.snb.2005.03.124