Generation of large-volume plasma by making use of multi-needle plasma at low-pressure

Generation of large-volume plasma by making use of multi-needle plasma at low-pressure

The description and investigation of a large-volume plasma source at low pressure are presented in this article. This new system is a modification of large-volume plasma source operated by thermionic filaments, and is an application of multi-needle plasma at atmospheric pressure stabilized by the fl...

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Veröffentlicht in:Thin solid films 2006-05, Vol.506 (Complete), p.474-478
Hauptverfasser: Hong, Yong C., Shin, Dong H., Lee, Soo C., Uhm, Han S.
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Sprache:eng
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Large-volume plasma
Magnetic field
Multi-needle plasma
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container_end_page 478
container_issue Complete
container_start_page 474
container_title Thin solid films
container_volume 506
creator Hong, Yong C.
Shin, Dong H.
Lee, Soo C.
Uhm, Han S.
description The description and investigation of a large-volume plasma source at low pressure are presented in this article. This new system is a modification of large-volume plasma source operated by thermionic filaments, and is an application of multi-needle plasma at atmospheric pressure stabilized by the flowing channel of a working gas through a high-voltage electrode operated by a AC (20 kHz) power supply. The weakly magnetized plasma is created by direct ionization of the background gas by low-energy electrons generated from multi-needle plasma, which are annularly arranged at one end of a cylindrical chamber. The bulk plasma experiment is conducted in the cylindrical stainless steel chamber with a radius of 0.5 m and a length of 3 m. Also, presented are preliminary experimental results of multi-needle plasma at atmospheric pressure.
doi_str_mv 10.1016/j.tsf.2005.08.348
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subjects Large-volume plasma
Magnetic field
Multi-needle plasma
title Generation of large-volume plasma by making use of multi-needle plasma at low-pressure
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