Generation of large-volume plasma by making use of multi-needle plasma at low-pressure
The description and investigation of a large-volume plasma source at low pressure are presented in this article. This new system is a modification of large-volume plasma source operated by thermionic filaments, and is an application of multi-needle plasma at atmospheric pressure stabilized by the fl...
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Veröffentlicht in: | Thin solid films 2006-05, Vol.506 (Complete), p.474-478 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | The description and investigation of a large-volume plasma source at low pressure are presented in this article. This new system is a modification of large-volume plasma source operated by thermionic filaments, and is an application of multi-needle plasma at atmospheric pressure stabilized by the flowing channel of a working gas through a high-voltage electrode operated by a AC (20 kHz) power supply. The weakly magnetized plasma is created by direct ionization of the background gas by low-energy electrons generated from multi-needle plasma, which are annularly arranged at one end of a cylindrical chamber. The bulk plasma experiment is conducted in the cylindrical stainless steel chamber with a radius of 0.5 m and a length of 3 m. Also, presented are preliminary experimental results of multi-needle plasma at atmospheric pressure. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/j.tsf.2005.08.348 |