Time and frequency response of two-arm micromachined thermal actuators

This paper examines the time and frequency response characteristics of two-arm micromachined thermal actuators. Two types of thermal actuators are considered: hot/cold arm actuators and 'V' or 'chevron' shaped actuators. A heat transfer equation governing the temperature profile...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2003-01, Vol.13 (1), p.40-46
Hauptverfasser:	Hickey, Ryan, Sameoto, Dan, Hubbard, Ted, Kujath, Marek
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Micromechanical devices and systems Physics Transducers
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Beschreibung
Zusammenfassung:	This paper examines the time and frequency response characteristics of two-arm micromachined thermal actuators. Two types of thermal actuators are considered: hot/cold arm actuators and 'V' or 'chevron' shaped actuators. A heat transfer equation governing the temperature profile along the thermal actuators is derived. Equations for the thermal time constants and the frequency responses are presented. The thermal time constants and frequency responses are measured experimentally and compared to analytical predictions.
ISSN:	0960-1317 1361-6439
DOI:	10.1088/0960-1317/13/1/306