Microfabrication techniques and applications

Microfabrication techniques and applications

The impact of advances in integrated circuit fabrication techniques on other microtechnologies is examined. The key techniques, photolithography and etching, are discussed. Applications of these techniques to the fabrication of diffraction gratings, thin windows, and photoresist molds for electropla...

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Veröffentlicht in:IEEE potentials 1990-10, Vol.9 (3), p.13-16
1. Verfasser: Ciarlo, D.
Format: Artikel
Sprache:eng
Schlagworte:
Application specific integrated circuits
Chemical vapor deposition
Electronic components
Fabrication
Integrated circuit technology
Resists
Semiconductor devices
Silicon
Sputter etching
Substrates
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Zusammenfassung:The impact of advances in integrated circuit fabrication techniques on other microtechnologies is examined. The key techniques, photolithography and etching, are discussed. Applications of these techniques to the fabrication of diffraction gratings, thin windows, and photoresist molds for electroplating are described.< >
ISSN:0278-6648
1558-1772
DOI:10.1109/45.101393