A simple and precise total reflection X-ray fluorescence spectrometer: construction and its applications

We present design and construction of a simple and precise total reflection X-ray fluorescence (TXRF) spectrometer. The spectrometer essentially comprises of an X-ray generator, a slit-collimator arrangement, a monochromator stage, a sample reflector stage and an X-ray detection system. The spectrometer is quite portable with its compact design and utilizes a Peltier cooled solid-state detector system for energy-dispersive X-ray fluorescence measurements. Use of a sine bar mechanism for angular motions for the two reflector stages makes the instrument fairly inexpensive. The TXRF attachment developed can be adopted to any of the X-ray tube energies (e.g., Cu, Mo, W tubes) and employ any variety of primary beam modification optics such as cut-off reflector, multilayer, natural crystal monochromator, etc. The flexibility built-in makes the spectrometer capable of ultra trace element analysis, surface characterization of thin films, wafers, etc. Salient features of the TXRF instrument developed and several applications for which it is employed for are described in this paper.