Extraction of contact resistivity on Kelvin L-resistor structures

Extraction of contact resistivity on Kelvin L-resistor structures

The D and L-Resistor types of the Kelvin cross resistor are the main test structures used to monitor contact resistance and contact resistivity. Despite the fact that the D type is more sensitive, both are widely used. A procedure is presented for the L type structure which permits the accurate, eas...

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Veröffentlicht in:IEEE transactions on electron devices 1994-06, Vol.41 (6), p.1073-1074
Hauptverfasser: Santander, J., Lozano, M., Cane, C.
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Conductivity
Contact resistance
Doping
Electrical resistance measurement
Electronics
Exact sciences and technology
Fabrication
Kelvin
Monitoring
Ohmic contacts
Resistors
Testing
Testing, measurement, noise and reliability
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container_issue 6
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container_title IEEE transactions on electron devices
container_volume 41
creator Santander, J.
Lozano, M.
Cane, C.
description The D and L-Resistor types of the Kelvin cross resistor are the main test structures used to monitor contact resistance and contact resistivity. Despite the fact that the D type is more sensitive, both are widely used. A procedure is presented for the L type structure which permits the accurate, easy and fast extraction of contact resistivity, taking into account the effects of spreading currents.< >
doi_str_mv 10.1109/16.293325
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subjects Applied sciences
Conductivity
Contact resistance
Doping
Electrical resistance measurement
Electronics
Exact sciences and technology
Fabrication
Kelvin
Monitoring
Ohmic contacts
Resistors
Testing
Testing, measurement, noise and reliability
title Extraction of contact resistivity on Kelvin L-resistor structures
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